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Plasma Monitor MCPD series Plasma Monitor
The best system corresponding to the purpose is offered.
MCPD systems(MCPD-3700 / MCPD-7700)
Provide optimum system solution for optical measurement to meet customer’s technical requirement based on fiber, software and optional units.

MCPD DETECTOR MAIN BODY Wavelength range
MCPD-3700: Standard version 220 ~ 1000 nm
MCPD-7700: High sensitivity version 220 ~ 1100 nm
Plasma Monitor
  • End-point, distribution response process and impurity detection

■ System configuration
Plasma monitor
(1) MCPD detector main body
(2) Light receiving fiber
(3) X-Y-Z stage
■ Measurement example
Spectrum of Ar plasma
Spectrum of Ar plasma
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