Film Thickness Evaluation System MCPD series -OTSUKA ELECTRONICS CO.,LTD.

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The best system corresponding to the purpose is offered.

MCPD systems(MCPD-9800 / MCPD-3700 / MCPD-7700 / MCPD-5000 / MCPD-N500) Provide optimum system solution for optical measurement to meet customer’s technical requirement based on fiber, software and optional units.

MCPD DETECTOR MAIN BODY	Wavelength range
MCPD-9800:Wide dynamic range version	360 ~ 1100 nm
MCPD-3700: Standard version	220 ~ 1000 nm
MCPD-7700: High sensitivity version	220 ~ 1100 nm
MCPD-5000: NIR version	900 ~ 1600 nm
MCPD-N500: NIR version	1100 ~ 2500 nm

Spectral Film Thickness Monitors

Spectral Ellipsometer FE-5000
Desk-top type Spectral Ellipsometer FE-5000S
Reflective Film Thickness Monitor FE-3000

Semiconductor film on wafer (Oxide film,Nitride film,Resist)
Film thickness of resist stripping solution and wet-status film
Coated film (Evaporation film,Adhesive,AcrylResin,Optical disk,Video head)
Plastic film (PET,PP,PE,PC,Nylon),functional film,film for wrapping

■ System configuration

(1) MCPD detector main body
(2) Reflection film thickness measurement unit
(3) Y-shaped fiber
(4) Light source

■ Measurement example

Interference Spectrum of Cell Gap

Semiconductor film on wafer (Oxide film,Nitride film,Resist)
Film thickness of resist stripping solution and wet-status film
Coated film (Evaporation film,Adhesive,AcrylResin,Optical disk,Video head)
Plastic film (PET,PP,PE,PC,Nylon),functional film,film for wrapping

■ System confuguration
Film Thickness Measurement (MCPD detector MAIN BODY+Microscope)

(1) MCPD detector main body
(2) Light source for area marker
(3) Fiber with area marker
(4) Microscope
(5) Microscope attachment
(6) Stabilizing power supply for microscope

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Organic OPC film, Inorganic selenium film, amorphous silicon film

■ System configuration
Photosensitive Drum Film Measurement

(1) MCPD detector main body
(2) Y-shaped fiber
(3) X-Y-θstage
(4) Light source

■ Measurement example

Change in thickness at each measuring point on photosensitive drum

■ System configuration
LB Film Measurement
(1) MCPD detector main body
(2) Reflection film thickness measurement unit
(3) Y-shaped fiber
(4) Light source

■ Measurement example

Change in thickness at each measuring point on photosensitive drum

■ System configuration
Deposition Film Measurement

(1) MCPD detector main body
(2) Y-shaped fiber for vacuum application
(3) Light source

■ Measurement example

Interference spectrum of evaporation film

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Semiconductor film on wafer (Oxide film,Nitride film,Resist)
Film thickness of resist stripping solution and wet-status film
Coated film (Evaporation film,Adhesive,AcrylResin,Optical disk,Video head)
Plastic film (PET,PP,PE,PC,Nylon),functional film,film for wrapping

■ System configuration
Multi-point Film Thickness Measurement Monitor

(1) MCPD detector main body
(2) Light receiving fiber
(3) Fiber switching unit
(4) Branched Y-shaped fiber
(5) Light source

■ Measurement example

Interference Spectrum of Protecting film on Optical Disk

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