

| Luminescence Spectrum Evaluation |
| Transmission/Absorption Spectrum Evaluation |
| Reflection Property Spectrum Evaluation |
| Film Thickness Evaluation |
| 916C | 1125C | |
| Wavelength range | 900 ~ 1600 nm | 1100 ~ 2500 nm |
| Mounting method | Brazed holographic type F = 3, f = 135 mm |
holographic type F = 3, f = 135 mm |
| Wavelength accuracy *1 | ±2 nm | ±2 nm |
| Detector | Electro-cooling InGaAs Linear image sensor 512ch |
Electro-cooling InGaAs Linear image sensor 256ch |
| Resolution | 1.7 (nm/pixel) | 6.3 (nm/pixel) |
| Scan time | 1msec ~ 10sec | |
| Optical fiber | Ge Doped Quartz, 2m | |
| Communication interface *2 | 232C | |
| Dimensions, Weight | 430(W)×350(D)×187(H) mm, Approx. 15 kg | |