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Industrial Gas Analyzer IG-1000V Measurement itemApplicationSpecificationsMeasurement example
Industrial Gas Analyzer IG-1000V
features
In addition to the functions of the IG-1000, the vacuum pump and the 10-m cell enable highly precise moisture analysis in gases.
The moisture analysis software can create blank data (i.e., with a moisture content of zero) from the measured data and can calculate accurate moisture content in gases.
Independent optical and electrical units provide more stable operation.
High-speed least-square waveform processing enables real-time analysis of multicomponent gases.
The traceable gas library installed supports high-speed, precise qualitative and quantitative analysis. A gas library may also be provided according to user requirements.
The optical system is installed in an airtight chamber that can be vacuumed to 1.3 x 10-3 Pa.

Measurement item
Qualitative & Quantitaitve analysis
Spectral analysis
Application
■Semiconductor
　・Analysis of the contents of moisture and trace impurities in corrosive gas
Specifications
  Liquid-nitrogen-cooled MCT detector Electronically cooled InAs detector
Measurement wavenumber range 700 ~ 5,000 cm-1 3,500 ~ 6,000 cm-1
Interferometer Michelson interferometer
Resolution 0.5 ~ 32 cm-1
Vacuum function with function (vacuum level 1.3×10-3Pa)
Gas cell Replaceable
Cell optical path length 1cm, 10cm, 2m, 4.2m, 10m
Dimensions(WDH) 685×350×280 mm*
Weight Approx. 52kg*
* Excluding cell unit
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