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Industrial Gas Analyzer IG-1000 Measurement itemApplicationSpecificationsMeasurement exampleOption
Industrial Gas Analyzer IG-1000
features
A wide range of easily replaceable gas cells (1cm - 10 m) supports a diverse range of samples.
In addition to the diverse gas cells, dual cells are also available that combine a 1cm cell and a 4.2-m cell. The dual cells enable measurements at measuring points with largely different concentrations by a simple switching process.
A high-sensitivity, high-response room-temperature DLaTGS detector is standard, supporting measurement from low to high wave-number regions without liquid nitrogen.
The installed standard software provides diverse functions including temperature and pressure calibration, temperature-change graphs, spectral analysis, warning display, multilingual display, multiple measurement methods, and valve operation.
The system monitors the temperature and pressure via the software, and processes the measured data with temperature and pressure correction to provide the most accurate results.
The traceable gas library installed supports high-speed, precise qualitative and quantitative analysis. It is also possible to provide a gas library according to user requirements.
Measurement item
Qualitative & Quantitative analysis
Spectral analysis
Application
R&D and production processes of semiconductor, LCD, MEMS.
 ・Estimation of efficiency of the decomposition and the displacement volume of PFCs gas discharged
  from processing equipment
 ・Optimization of the processes
 ・Evaluation of efficiency of the equipment to remove the exhausted emission gasses
 ・Monitoring of a gas leakage of multi-components
 ・Analysis of the contents of moisture and trace impurities in corrosive gas
Specifications
  Liquid-nitrogen-cooled MCT detector Electronically cooled InAs detector
Measurement wavenumber range 600 ~ 5,000 cm-1 3,500 ~ 6,000 cm-1
Interferometer Michelson interferometer
Resolution 0.5 ~ 32 cm-1
Vacuum function None
Gas cell Replaceable
Cell optical path length 1cm, 10cm, 2m, 4.2m, 10m, cell
Dimensions(WDH) 685×350×280 mm*
Weight Approx. 52kg*
* Excluding cell unit
Option
Gas cell (1cm,10cm,2m,4.2m,10m)
Dual cell (1cm+4.2m)
Pressure transducer
Cell heater   
Cell cover
Localized box for exhaust gas
Sampling unit
Vacuum pump(for IG-1000V)
Diaphragm pump

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