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Desk-top type Spectral Ellipsometer FE-5000S Measurement itemSpecifications
Desk-top type Spectral Ellipsometer FE-5000S
features
High speed measurement of over 400 channels spectroscopy

Suitable for detailed analyzing thin film thickness with reflection at auto -incident angle setting

Auto-signbar driving method making high accuracy angle setting.
Simultaneous analysis of various incident angles inevitable for thin film thickness analysis.
Possible to measure n.k. of bulk and metal surface.
Measurement item
Ellipso-parameters (tanψ, cosΔ)
Optical constant analysis
(n: Refractive index, k: Extinction coefficient)
Film thickness
Specifications
Sample size 100 × 100 mm
Measurement method Rotating analyzer method
Incident /Receive angle range

45 ~ 90°
Angle driving method Auto signbar driving method
Measurable wavelength range 300 ~ 800 nm
Spectrophotometer Polychrometer
Dimension（WDH） 650×400×560 mm
Weight Approx. 50kg
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