Inspection machine, science measurement, analysis equipment, and medical equipment
HOME>Product>Spectral Ellipsometer FE-5000
Spectral Ellipsometer FE-5000 Measurement itemApplicationSpecificationsMeasurement example
Spectral Ellipsometer FE-5000
features
Supports ellipsoparameter measurements in the wavelength region from ultraviolet to visible light (250 - 800 nm).

Supports thickness analysis of multilayer films on the order of nanometers.

Supports high-speed ellipsospectrum measurement based on multichannel spectroscopy using over 400 channels.
Supports variable reflection-angle measurement for detailed analysis of thin films.
Improved operability through implementation of an optical-constant database and addition of the recipe registration function.
Supports film-thickness and quality control through optical-constant measurement based on multilayer-film fitting analysis.
Measurement item
Ellipso-parameters (tanψ, cosΔ)
Optical constant analysis
(n: Refractive index, k: Extinction coefficient)
Film thickness

■ Semiconductor wafers
　・Gate oxidized thin films, nitrided films
　・SiO2,SixOy,SiN,SiON,SiNx,Al2O3,SiNxOy,poly-Si,ZnSe,BPSG,TiN
　・Optical constants of resist (Wavelength dispersion)
■ Compound semiconductors
　・AlxGa(1-x)As multi-layer films, amorphous silicon
■ FPD
　・Orientated films
　・ITO, MgO, etc. for plasma display
■ New materials
　・DLC(Diamond Like Carbon),thin films for superconduction,magnetic head thin films
■ Optical thin films
　・TiO2,SiO2,multi-layer films, anti-reflection film, reflective film
■ Lithography
　・Evaluation of n and k of g line (436 nm), h line (405 nm),i line (365 nm) and KrF (248 nm) at each wavelength
Specifications
Measurable range 0.1 nm ~
Measurable wavelength range 250 ~ 800 nm （Option : 350 ~ 1000 nm）
Detector Electro-cooling one dimension detector 512ch
Indident/Receive angle range 45 ~ 90°
Power supply AC1500VA (Auto)
Dimension（WDH） 1300×900×1750 mm
Weight Approx. 350kg (Auto)
Return to top
copyright(c)otsuka electronics co.,ltd all rights reserved.