Inspection machine, science measurement, analysis equipment, and medical equipment
Reflective Film Thickness Monitor FE-3000 Measurement itemApplicationSpecificationsMeasurement example
Reflective Film Thickness Monitor FE-3000
features
Optical interferotype film-thickness monitor based on reflected ultraviolet to near-infrared light. Supports thickness measurement and optical-constant analysis of multilayer films.
Adoption of spectroscopy enables non-contact, non-destructive, highly precise, highly reproducible thickness measurement.
Supports a wide range of wavelengths (190 - 1,100 nm).
Supports a wide range of thickness measurement from thin films to thick films (1 nm - 250 μm).
Supports microscopic measurement.
Measurement item
Absolute reflectance
Tramsmittance/Absorption
Multi-layer thin film thickness

Thin film physical property analysis
(n: Refractive index, k: Extinction coefficient)
Application
■ FPD
　・LCD、TFT、OrganicEL
■ Semiconductor、Compound Semiconductor
　・SiSemiconductor、Semiconductor laser、Ferroelectric material
■ Data storage
　・DVD、Magnetic head
■ Optical material
　・Filter、AR film
■ FPD
　・LCD、TFT、OrganicEL
■ Film
　・ARFilm
■ Oher
　・Construction material
Specifications
  Standard Thick Film Version
Measurable range 1 nm ~ 40 μm 0.8 ~ 250 μm
Measurable wavelength range 190 ~ 1100 nm 750 ~ 850 nm
Detector Photo diode array 512ch
CCD area image sensor 512ch		 Photo diode array 512ch
Light source D2/I2(UV-VIS),
D2(UV),I2(VIS)		 I2(VIS)
Power supply AC100V±10V 750VA (Auto)
Dimension（WDH） 481×770×714 mm (Auto, Main unit)
Weight Approx. 96kg (Auto, Main unit)
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